UV Process

ADRC Technology Introduction for ADRC process

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UV-ozone
제조사 : USHIO
Lamp : Excimer lamps
Model : SUS05
Wavelength : 172 nm
FWHM : 14 nm
Irradiance : 10 mW/cm2
Utilities : 5.5 Nl/min N2
Substrate size : Max 10 cm x 10cm
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UV Curing

Company : KJUV

Substrate size : Max. 200 mm x 200 mm

Timer : 0 ~ 999 min

High pressure UV lamp (Ozone less lamp)

Atmosphere : N2

Wavelength : 365 nm

Power : 90 W/cm

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