Measurement

보유공정 소개 Introduction for ADRC process

경희대학교 차세대 디스플레이 연구센터(ADRC)는

디스플레이 연구분야에 있어서 세계를 선도하고 있습니다.

  총 50개의 공정이 등록되어 있습니다. 검색하실 공정명이나 사양을 입력하시고 검색을 클릭하세요.
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Cell gap / Pretilt angle
Company : 세심광
Model. No: PAMS-200
1. Cell-gap, Pre-tilt angle calculation
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Optical Microscopy
Company : OLYMPUS
Model. No: BX51TRF
1. Magnifying capacity of a lens: 5x ~ 100x
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Electronic Scale
Product name : Explorer Pro
Model. No. : EPG214C
Capacity : 210 g
Readability : 0.1 mg
Repeatability (Std.dev.) : 0.1 mg
Linearity : ±0.2 mg
Weighing Units : g, mg, ct
Stabilization time (seconds) : 4
Operating temperature range : 50° to 86° F / 10° to 30° C
Calibration : AutoCalTM Internal Calibration
Pan size (Dia.) (in/cm) : 3.5 / 9
Net Wt. (lb/kg) : 13.6 / 6
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TFT measurement
Company :
Accessory : Probe station, Hot chuck, Agilent 4156C
Chuck Size : 15 cm × 15 cm
Microscope : Object lens x5,x10, x20
Dark shield Box : 900[w]x780[d]x1000[h]
Probe Tip (Gold) : 4 개
Temperature : RT~100 ℃
Voltage : 2 µV ~ 200V
Current : 1 fA~1 A
SMU pulse width : 500 µs~100 ms
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Capacitance-Voltage
Company : Agilent
Model. No : E4980A
Frequency : 20Hz ~ 2MHz
DC bias : Max. Internal 40 V
High speed measurement : 5.6 ms
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Conductivity
Company :
Model. No:
Accessory : Agilent 195, Keithley 845
Voltage : 2 µV ~ 200 V
4-Terminal Method
Temperature range : RT ~ 300 °C
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Hall Effect
Model. No : HMS-3000
Input current : 1 nA ~ 20 mA
Resistivity : 10-1 ~ 107 Ωcm
Density : 107 ~ 1021 cm-1
Mobility : 1 ~ 107 cm2/vs
Sample size : 6mm x 6mm ~ 20mm x 20mm
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Sheet resistance
Model. No. : CMT-100MP
* Sheet resistance measurement
∙ Measuring range : 1 mΩ/sq ~2 MΩ/sq
∙ Measuring method : Contatced by four point probe.
∙ Measuring point : 1 point for only stage center.

* Specific resistance measurement
∙ Measuring method : Contacted by four point probe.
∙ Measuring range : 10 μΩ∙cm ~ 200 kΩ∙cm
∙ Measuring point : 1 point for only stage center.

* Maximum 200mm wafer or 220×220mm square sample.
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Thickness (α-step)
Company : Kosaka Laboratory Ltd.
Model. No : ET-3000

Measurement stage : 160 X 160mm
Measurement range
1) z-axis – 10nm ~ 600μm
2) x-axis – < 52mm
Measurement pressure : 10 ~ 500μN
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Contact angle
Model. No. Phoenix 600
Max. sample size : 300 x 350 /300 mm (12") wafer
Max. sample thickness : 50 mm
Zoom : 6.4 times
Resolution : 768 x 576 NTSC, 16 M color
Dispensing type : PC controlled automatic syringe system
Max. fluid number : 1 liquid (Option 3 liquids)
Contac angle range : 0 ~ 90 °
Accuracy : ± 0.1 °
Operating system : Windows XP/ Windows 2000
Domensions (LxWxH) : 385x290x256 mm
차세대 디스플레이 연구센터 (ADRC)
서울특별시 동대문구 경희대로 26 경희대학교 푸른솔 문화관 129호
TEL. 02-961-0607,0688  |  개인정보관리책임자 : ADRC 공정조교  |  E-mail : adrc2000@tft.khu.ac.kr
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